Inventor

TOKURI KENTARO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “TOKURI KENTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ARAKI HIROYUKI

2 patents

US8277569B2Oct 2, 2012

Substrate treating apparatus and substrate treating method

ARAKI HIROYUKI5 citations70

US8524009B2Sep 3, 2013

Substrate treating method

ARAKI HIROYUKI0 citations48

DAINIPPON SCREEN MFG

2 patents

US7311781B2Dec 25, 2007

Substrate rotation type treatment apparatus

DAINIPPON SCREEN MFG4 citations60

US8646469B2Feb 11, 2014

Substrate treating apparatus

DAINIPPON SCREEN MFG1 citations49

SCREEN HOLDINGS CO LTD

1 patent

US9721815B2Aug 1, 2017

Substrate processing apparatus and substrate processing method

SCREEN HOLDINGS CO LTD0 citations39