Inventor
SHEN YAN PING
US5 patents
Patents
5 patentsUS9418899B1Aug 16, 2016
Method of multi-WF for multi-Vt and thin sidewall deposition by implantation for gate-last planar CMOS and FinFET technology
GLOBALFOUNDRIES INC8 citations82
US9331159B1May 3, 2016
Fabricating transistor(s) with raised active regions having angled upper surfaces
GLOBALFOUNDRIES INC10 citations82
US9312145B2Apr 12, 2016
Conformal nitridation of one or more fin-type transistor layers
GLOBALFOUNDRIES INC2 citations61
US9202697B2Dec 1, 2015
Forming a gate by depositing a thin barrier layer on a titanium nitride cap
GLOBALFOUNDRIES INC2 citations61
US9698269B2Jul 4, 2017
Conformal nitridation of one or more fin-type transistor layers
GLOBALFOUNDRIES INC1 citations51