Inventor

KAGAWA TADANOBU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KAGAWA TADANOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD

1 patent

US9379030B2Jun 28, 2016

Ion implantation method and ion implantation apparatus

SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD1 citations47

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD

1 patent

US10249477B2Apr 2, 2019

Ion implanter and ion implantation method

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD0 citations36

SUMITOMO HEAVY IND ION TECH CO LTD

1 patent

US9564289B2Feb 7, 2017

Ion implanter and method of controlling the same

SUMITOMO HEAVY IND ION TECH CO LTD0 citations35