Inventor
LIUKKU MATTI
FI27 patents
Patents
27 patentsUS9547020B2Jan 17, 2017
Capacitive micromechanical sensor structure and micromechanical accelerometer
MURATA MANUFACTURING CO9 citations83
US12262176B2Mar 25, 2025
Transducer
MURATA MANUFACTURING CO2 citations74
US11979713B2May 7, 2024
Piezoelectric device
MURATA MANUFACTURING CO2 citations72
US11296671B2Apr 5, 2022
MEMS frequency-tuning springs
MURATA MANUFACTURING CO3 citations72
US10969575B2Apr 6, 2021
MEMS reflector with center support
MURATA MANUFACTURING CO2 citations72
US9575088B2Feb 21, 2017
Capacitive micromechanical acceleration sensor
MURATA MANUFACTURING CO2 citations72
US10914939B2Feb 9, 2021
MEMS reflector system
MURATA MANUFACTURING CO1 citations62
US11796560B2Oct 24, 2023
MEMS accelerometer with mechanically decoupled proof mass
MURATA MANUFACTURING CO2 citations59
US12528693B2Jan 20, 2026
Motion limiter with reduced stiction
MURATA MANUFACTURING CO0 citations51
US12507594B2Dec 23, 2025
Piezoelectric device
MURATA MANUFACTURING CO0 citations51
US12474366B2Nov 18, 2025
Three-axis accelerometer with two masses
MURATA MANUFACTURING CO0 citations51
US12428291B2Sep 30, 2025
In-plane and out-of-plane accelerometer
MURATA MANUFACTURING CO0 citations51
US11977094B2May 7, 2024
Seesaw accelerometer
MURATA MANUFACTURING CO0 citations51
US11867714B2Jan 9, 2024
Accelerometer with two seesaws
MURATA MANUFACTURING CO0 citations51
US11820648B2Nov 21, 2023
Vibration damping in MEMS acceleration sensors
MURATA MANUFACTURING CO0 citations51
US11526000B2Dec 13, 2022
Two-axis MEMS mirror with separated drives
MURATA MANUFACTURING CO0 citations51
US11467181B2Oct 11, 2022
Low-noise multi-axis MEMS accelerometer
MURATA MANUFACTURING CO0 citations51
US11105828B2Aug 31, 2021
Microelectromechanical device for out-of-plane motion detection
MURATA MANUFACTURING CO0 citations51
US11067793B2Jul 20, 2021
Mems reflector system with trajectory control
MURATA MANUFACTURING CO0 citations51
US9764942B2Sep 19, 2017
Multi-level micromechanical structure
MURATA MANUFACTURING CO0 citations51
US11131688B2Sep 28, 2021
Robust z-axis acceleration sensor
MURATA MANUFACTURING CO0 citations48
US11002957B2May 11, 2021
Scanning optical device with broadened image area
MURATA MANUFACTURING CO0 citations46
US10823568B2Nov 3, 2020
Capacitive microelectromechanical accelerometer
MURATA MANUFACTURING CO0 citations41
US10809279B2Oct 20, 2020
Capacitive microelectromechanical accelerometer
MURATA MANUFACTURING CO0 citations41
US10137851B2Nov 27, 2018
MEMS sensor and a semiconductor package
MURATA MANUFACTURING CO0 citations41
US9969606B2May 15, 2018
Microelectromechanical structure and device
MURATA MANUFACTURING CO0 citations38
US10281486B2May 7, 2019
Microelectromechanical accelerometer device
MURATA MANUFACTURING CO0 citations30