Inventor
JEON HWAN-CHUL
KR6 patents
Patents
6 patentsUS10065402B2Sep 4, 2018
Method of manufacturing pellicle assembly and method of photomask assembly including the same
SAMSUNG ELECTRONICS CO LTD5 citations72
US10437143B2Oct 8, 2019
Pellicle for exposure to extreme ultraviolet light, photomask assembly, and method of manufacturing the pellicle
SAMSUNG ELECTRONICS CO LTD3 citations70
US10073337B2Sep 11, 2018
Pellicle and photomask assembly including the same
SAMSUNG ELECTRONICS CO LTD5 citations70
US11067887B2Jul 20, 2021
Apparatus for manufacturing pellicle
SAMSUNG ELECTRONICS CO LTD0 citations62
US10747104B2Aug 18, 2020
Method of manufacturing pellicle and apparatus for assembling pellicle
SAMSUNG ELECTRONICS CO LTD0 citations51
US10345698B2Jul 9, 2019
Method for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations39