Inventor

ARAMAKI KOJI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “ARAMAKI KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

1 patent

US7710455B2May 4, 2010

Node management system and node managing program using sensing system

HITACHI INT ELECTRIC INC18 citations80

TOKYO ELECTRON LTD

1 patent

US11715657B2Aug 1, 2023

Substrate misalignment detection method, substrate position abnormality determination method, substrate transfer control method, and substrate misalignment detection device

TOKYO ELECTRON LTD0 citations56