Inventor
SEXTON GREGORY S
US10 patents
⚠️ This page may combine multiple inventors who share the name “SEXTON GREGORY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS7938931B2May 10, 2011
Edge electrodes with variable power
LAM RES CORP11 citations83
US7662254B2Feb 16, 2010
Methods of and apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer
LAM RES CORP8 citations82
US9564308B2Feb 7, 2017
Methods for processing bevel edge etching
LAM RES CORP2 citations73
US7922866B2Apr 12, 2011
Apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer
LAM RES CORP4 citations60
US12387915B2Aug 12, 2025
Lower plasma exclusion zone ring for bevel etcher
LAM RES CORP0 citations50
US7575638B2Aug 18, 2009
Apparatus for defining regions of process exclusion and process performance in a process chamber
LAM RES CORP0 citations41
SEXTON GREGORY S
4 patentsUS9184043B2Nov 10, 2015
Edge electrodes with dielectric covers
SEXTON GREGORY S4 citations71
US8574397B2Nov 5, 2013
Bevel edge plasma chamber with top and bottom edge electrodes
SEXTON GREGORY S1 citations60
US8252140B2Aug 28, 2012
Plasma chamber for wafer bevel edge processing
SEXTON GREGORY S1 citations60
US8398875B2Mar 19, 2013
Method of orienting an upper electrode relative to a lower electrode for bevel edge processing
SEXTON GREGORY S0 citations48