Inventor
LAJOS ROBERT E
US4 patents
Patents
4 patentsUS4198261AApr 15, 1980
Method for end point detection during plasma etching
GOULD INC70 citations93
US4582559AApr 15, 1986
Method of making thin free standing single crystal films
GOULD INC63 citations92
US4331035AMay 25, 1982
Geometric balance adjustment of thin film strain gage sensors
GOULD INC39 citations89
US4428976AJan 31, 1984
Geometric balance adjustment of thin film strain gage sensors
GOULD INC21 citations79