P

Inventor

YU CHANG

CN38 patents
⚠️ This page may combine multiple inventors who share the name “YU CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRON TECHNOLOGY INC

12 patents
US5173441ADec 22, 1992

Laser ablation deposition process for semiconductor manufacture

MICRON TECHNOLOGY INC166 citations99
US5032233AJul 16, 1991

Method for improving step coverage of a metallization layer on an integrated circuit by use of a high melting point metal as an anti-reflective coating during laser planarization

MICRON TECHNOLOGY INC181 citations99
US5236865AAug 17, 1993

Method for simultaneously forming silicide and effecting dopant activation on a semiconductor wafer

MICRON TECHNOLOGY INC123 citations98
US5202278AApr 13, 1993

Method of forming a capacitor in semiconductor wafer processing

MICRON TECHNOLOGY INC126 citations98
US5147819ASep 15, 1992

Semiconductor metallization method

MICRON TECHNOLOGY INC99 citations96
US5124780AJun 23, 1992

Conductive contact plug and a method of forming a conductive contact plug in an integrated circuit using laser planarization

MICRON TECHNOLOGY INC107 citations96
US5094977AMar 10, 1992

Stress reduction in metal films by laser annealing

MICRON TECHNOLOGY INC55 citations96
US5139967AAug 18, 1992

Process for planarizing insulating dielectric material

MICRON TECHNOLOGY INC22 citations93
US5139974AAug 18, 1992

Semiconductor manufacturing process for decreasing the optical refelctivity of a metal layer

MICRON TECHNOLOGY INC36 citations93
US5066611ANov 19, 1991

Method for improving step coverage of a metallization layer on an integrated circuit by use of molybdenum as an anti-reflective coating

MICRON TECHNOLOGY INC28 citations92
US5085080AFeb 4, 1992

Temperature and pressure measuring technique using the photoacoustic effect and mechanical resonance

MICRON TECHNOLOGY INC20 citations82
US5106779AApr 21, 1992

Method for widening the laser planarization process window for metalized films on semiconductor wafers

MICRON TECHNOLOGY INC9 citations74

HUAWEI TECH CO LTD

8 patents

NORTEL NETWORKS LTD

4 patents

NORTEL NETWORKS CORP

2 patents

CORBETT ALLISON MENSING

2 patents

NCOMPUTING INC

2 patents

UNIV EAST CAROLINA

1 patent

(unassigned)

1 patent

HUNAN KEYSHARE INFORMATION TECH CO LTD

1 patent

MA PEIFENG

1 patent

UNIV VANDERBILT

1 patent

UNIV DALIAN TECH

1 patent

YU CHANG

1 patent

FUTUREWEI TECHNOLOGIES INC

1 patent