Inventor

KALLIS MARTIN

DE3 patents

⚠️ This page may combine multiple inventors who share the name “KALLIS MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG MICROTECH GMBH STERNENFE

1 patent

US5455062AOct 3, 1995

Capillary device for lacquering or coating plates or disks

STEAG MICROTECH GMBH STERNENFE24 citations83

STEAG MICRO TECH GMBH

1 patent

US5650196AJul 22, 1997

Device for coating substrates in semiconductor production

STEAG MICRO TECH GMBH12 citations65

STEAG HAMATECH GMBH MACHINES

1 patent

US6203849B1Mar 20, 2001

Process and device for coating disc-shaped data storage media

STEAG HAMATECH GMBH MACHINES2 citations54