Inventor
SU SHU-HUI
TW14 patents
⚠️ This page may combine multiple inventors who share the name “SU SHU-HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11063157B1Jul 13, 2021
Trench capacitor profile to decrease substrate warpage
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10361152B2Jul 23, 2019
Semiconductor structure having an air-gap region and a method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations83
US11769792B2Sep 26, 2023
Trench capacitor profile to decrease substrate warpage
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US12176387B2Dec 24, 2024
Trench capacitor profile to decrease substrate warpage
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11923352B2Mar 5, 2024
Semiconductor device with capacitor and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12230542B2Feb 18, 2025
Method for dicing a semiconductor wafer structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12317517B2May 27, 2025
Semiconductor die package and methods of formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12199139B2Jan 14, 2025
Trench capacitor film scheme to reduce substrate warpage
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12543326B2Feb 3, 2026
Deep trench capacitor and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48