Inventor

LIN CHIN-HSIANG

TW367 patents

⚠️ This page may combine multiple inventors who share the name “LIN CHIN-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIN CHIN-HSIANG

TAIWAN SEMICONDUCTOR MFG

Contact structure of semiconductor device

Contact structure of semiconductor device

Megasonic immersion lithography exposure apparatus and method

Method utilizing compensation features in semiconductor processing

Pattern compensation for stitching

Self-aligned dual-metal silicide and germanide formation

Dummy vias for damascene process

Progressive self-learning defect review and classification method

Contact structure of semiconductor device

Finlike structures and methods of making same

Immersion lithography apparatus and methods

Method for forming a lithography pattern

Method and systems to print contact hole patterns

Immersion optical projection system

Method and systems to print contact hole patterns

Phase-shift mask for printing high-resolution images and a method of fabrication

TAIWAN SEMICONDUCTOR MFG CO LTD

Semiconductor method of protecting wafer from bevel contamination

FinFETs and methods of forming FinFETs

Photoresist developer and method of developing photoresist

Method of manufacturing semiconductor devices

Extreme ultraviolet photolithography method with developer composition

Method of manufacturing semiconductor devices

Pattern fidelity enhancement with directional patterning technology

Methods of reducing pattern roughness in semiconductor fabrication

Dummy fin structures and methods of forming same

Multi-layer photoresist

FinFETs and methods of forming FinFETs

Pellicle fabrication methods and structures thereof

Directional patterning methods

Contact structure of semiconductor device

Method for mask data synthesis with wafer target adjustment

Method of test probe alignment control

UNITED MICROELECTRONICS CORP

Method of manufacturing multilevel interconnects including performing a surface treatment to form a hydrophilic surface layer

Metal oxide semiconductor transistor with Y shape metal gate and fabricating method thereof

Metal oxide semiconductor transistor with Y shape metal gate

Process for spin-on coating with an organic material having a low dielectric constant

MACRONIX INT CO LTD

Method for forming nitride spacer by using atomic layer deposition

Methods for filling shallow trench isolations having high aspect ratios

VANGUARD INT SEMICONDUCT CORP

Electronically switchable off-axis illumination blade for stepper illumination system

Method and system of exposure with a universal dynamic mask and charge coupled device image feedback control

YEH MING-HSI

Finlike structures and methods of making same

Method of fabricating an integrated circuit device

SUN SEY-PING

Semiconductor device having elevated structure and method of manufacturing the same

LIN SU-HORNG

Methods of fabricating metal hard masks

WANG HSIEN-CHENG

Photoresist materials and photolithography processes

HUANG KUO BIN

High temperature anneal for aluminum surface protection

LIN SIMON SU-HORNG

Integration of bottom-up metal film deposition

CHEN SHIH-HUNG

Loadport bridge for semiconductor fabrication tools

LIN CHIN-HSIANG

Source/drain stressor having enhanced carrier mobility manufacturing same

CHANG SHIH-MING

Holographic reticle and patterning method