Inventor

YANG IL HO

KR2 patents

Patents

2 patents

US9493677B2Nov 15, 2016

Polishing composition, method for fabricating thereof and method of chemical mechanical polishing using the same

SK HYNIX INC3 citations69

US9068110B2Jun 30, 2015

Polishing slurry and chemical mechanical planarization method using the same

SK HYNIX INC1 citations49