Inventor
NONAKA YUYA
JP4 patents
Patents
4 patentsUS9365924B2Jun 14, 2016
Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF power
ASM IP HOLDING BV463 citations96
US9899291B2Feb 20, 2018
Method for protecting layer by forming hydrocarbon-based extremely thin film
ASM IP HOLDING BV463 citations95
US10526704B2Jan 7, 2020
Film forming apparatus
ASM IP HOLDING BV1 citations60
US11761084B2Sep 19, 2023
Substrate processing apparatus and method of processing substrate
ASM IP HOLDING BV0 citations51