Inventor

CHANG CHUN-LIN

TW45 patents

⚠️ This page may combine multiple inventors who share the name “CHANG CHUN-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG CHUN-LIN

TAIWAN SEMICONDUCTOR MFG CO LTD

Multi-zone temperature control for semiconductor wafer

Lithography apparatus and method for using the same

Rotatable and tunable heaters for semiconductor furnace

Shock wave visualization for extreme ultraviolet plasma optimization

Mitigating long-term energy decay of laser devices

Shock wave visualization for extreme ultraviolet plasma optimization

Semiconductor processing tool and methods of operation

Method and apparatus for mitigating contamination

Apparatus and method for generating extreme ultraviolet radiation

Detection using semiconductor detector

Method and apparatus for mitigating contamination

High resistance virtual anode for electroplating cell

Apparatus and method for generating extreme ultraviolet radiation

Apparatus and method for generating an electromagnetic radiation

Light source system and polarization angle adjusting method

Apparatus and method for generating an electromagnetic radiation

Multi-zone temperature control for semiconductor wafer

Shock wave visualization for extreme ultraviolet plasma optimization

Mitigating long-term energy decay of laser devices

EUV light source and apparatus for lithography

Ion implantation with charge and direction control

Ion beam dimension control for ion implantation process and apparatus, and advanced process control

Method for monitoring ion implantation

High resistance virtual anode for electroplating cell

High resistance virtual anode for electroplating cell

HWANG CHIH-HONG

Ion beam dimension control for ion implantation process and apparatus, and advanced process control

Beam monitoring device, method, and system

System and method of ion beam source for semiconductor ion implantation

Ion implantation with charge and direction control

CHANG CHUN-LIN

Multi-zone temperature control for semiconductor wafer

System and method of ion neutralization with multiple-zoned plasma flood gun

Apparatus for monitoring ion implantation

HUI KEUNG

System and method of dosage profile control

Scanning method and system using 2-D ion implanter

TSMC SOLID STATE LIGHTING LTD

Light emitting diode

Methods of forming through silicon via openings

TAIWAN SEMICONDUCTOR MFG

Apparatus for monitoring ion implantation

System and method of dosage profile control

CHENG NAI-HAN

Multi-ion beam implantation apparatus and method

Multi-factor advanced process control method and system for integrated circuit fabrication

HANNSTAR DISPLAY CORP

Liquid crystal display and bidirectional shift register device thereof

HON HAI PREC IND CO LTD

Lower die for a bending machine

WEI ZIN-CHANG

Rotatable and tunable heaters for semiconductor furnace

CHERN CHYI SHYUAN

Methods of forming through silicon via openings

WU HSIN-HSIEN

Light emitting diode and method of fabrication thereof