Inventor
HWANG CHIH-HONG
TW17 patents
⚠️ This page may combine multiple inventors who share the name “HWANG CHIH-HONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS12588237B2Mar 24, 2026
Method for forming via structure with low resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11837663B2Dec 5, 2023
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11081585B2Aug 3, 2021
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US9865429B2Jan 9, 2018
Ion implantation with charge and direction control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9805913B2Oct 31, 2017
Ion beam dimension control for ion implantation process and apparatus, and advanced process control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9449889B2Sep 20, 2016
Method for monitoring ion implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10693004B2Jun 23, 2020
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
HWANG CHIH-HONG
4 patentsUS9070534B2Jun 30, 2015
Ion beam dimension control for ion implantation process and apparatus, and advanced process control
HWANG CHIH-HONG0 citations49
US8766207B2Jul 1, 2014
Beam monitoring device, method, and system
HWANG CHIH-HONG0 citations49
US8664622B2Mar 4, 2014
System and method of ion beam source for semiconductor ion implantation
HWANG CHIH-HONG0 citations49
US8922122B2Dec 30, 2014
Ion implantation with charge and direction control
HWANG CHIH-HONG0 citations39