Inventor

PARK YO-CHOUL

KR3 patents

⚠️ This page may combine multiple inventors who share the name “PARK YO-CHOUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHOI YOO-JEONG

1 patent

US9665003B2May 30, 2017

Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns

CHOI YOO-JEONG3 citations68

CHEIL IND INC

1 patent

US9513546B2Dec 6, 2016

Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition

CHEIL IND INC1 citations49

SONG HYUN JI

1 patent

US10345706B2Jul 9, 2019

Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition

SONG HYUN JI0 citations31