Inventor

HERBST TIM W

US2 patents

⚠️ This page may combine multiple inventors who share the name “HERBST TIM W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FSI INT INC

1 patent

US6845779B2Jan 25, 2005

Edge gripping device for handling a set of semiconductor wafers in an immersion processing system

FSI INT INC7 citations70

TEL MFG AND ENGINEERING OF AMERICA INC

1 patent

US11476129B2Oct 18, 2022

Translating and rotating chuck for processing microelectronic substrates in a process chamber

TEL MFG AND ENGINEERING OF AMERICA INC2 citations60