Inventor
REBENNE HELEN E
US11 patents
⚠️ This page may combine multiple inventors who share the name “REBENNE HELEN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AEROQUIP CORP
5 patentsUS5863023AJan 26, 1999
Valved coupling for ultra high purtiy gas distribution system
AEROQUIP CORP57 citations95
US5664759ASep 9, 1997
Valved coupling for ultra high purity gas distribution systems
AEROQUIP CORP26 citations92
US6035609AMar 14, 2000
Ultra high purity gas distribution component with integral valved coupling and methods for its use
AEROQUIP CORP22 citations91
US5810031ASep 22, 1998
Ultra high purity gas distribution component with integral valved coupling and methods for its use
AEROQUIP CORP24 citations91
US5924447AJul 20, 1999
Ultra high purity gas distribution component with integral valved coupling and methods for its use
AEROQUIP CORP10 citations72
MATERIALS RESEARCH CORP
4 patentsUS5370739ADec 6, 1994
Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD
MATERIALS RESEARCH CORP188 citations98
US5273588ADec 28, 1993
Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means
MATERIALS RESEARCH CORP228 citations98
US5356476AOct 18, 1994
Semiconductor wafer processing method and apparatus with heat and gas flow control
MATERIALS RESEARCH CORP151 citations97
US5434110AJul 18, 1995
Methods of chemical vapor deposition (CVD) of tungsten films on patterned wafer substrates
MATERIALS RESEARCH CORP35 citations92