Inventor

KOOSAU DENNIS

US3 patents

⚠️ This page may combine multiple inventors who share the name “KOOSAU DENNIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATYUSHKIN ALEXANDER

2 patents

US8226769B2Jul 24, 2012

Substrate support with electrostatic chuck having dual temperature zones

MATYUSHKIN ALEXANDER80 citations96

US8663391B2Mar 4, 2014

Electrostatic chuck having a plurality of heater coils

MATYUSHKIN ALEXANDER35 citations92

APPLIED MATERIALS INC

1 patent

US6466426B1Oct 15, 2002

Method and apparatus for thermal control of a semiconductor substrate

APPLIED MATERIALS INC57 citations93