Inventor

TOWERY DANIEL L

US4 patents

⚠️ This page may combine multiple inventors who share the name “TOWERY DANIEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ALLIED SIGNAL INC

2 patents

US6270395B1Aug 7, 2001

Oxidizing polishing slurries for low dielectric constant materials

ALLIED SIGNAL INC64 citations94

US6153525ANov 28, 2000

Methods for chemical mechanical polish of organic polymer dielectric films

ALLIED SIGNAL INC52 citations91

HONEYWELL INC

1 patent

US6152148ANov 28, 2000

Method for cleaning semiconductor wafers containing dielectric films

HONEYWELL INC84 citations94

HONEYWELL INT INC

1 patent

US6630433B2Oct 7, 2003

Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride

HONEYWELL INT INC39 citations91