Inventor
HORIKAWA HIROTO
JP8 patents
Patents
8 patentsUS6721034B1Apr 13, 2004
Stage unit, drive table, and scanning exposure apparatus using the same
NIKON CORP90 citations96
US5991005ANov 23, 1999
Stage apparatus and exposure apparatus having the same
NIKON CORP70 citations95
US6262797B1Jul 17, 2001
Stage unit, drive table, and scanning exposure apparatus using the same
NIKON CORP17 citations91
US5850280ADec 15, 1998
Stage unit, drive table, and scanning exposure and apparatus using same
NIKON CORP35 citations91
US7081946B2Jul 25, 2006
Holding apparatus, holding method, exposure apparatus and device manufacturing method
NIKON CORP8 citations72
US6124923ASep 26, 2000
Stage unit, drive table, and scanning exposure apparatus using the same
NIKON CORP13 citations72
US6211946B1Apr 3, 2001
Stage unit, drive table, and scanning exposure apparatus using the same
NIKON CORP7 citations70
US7466396B2Dec 16, 2008
Lithography apparatus and method utilizing pendulum interferometer system
NIKON CORP2 citations60