Inventor
AMAKAWA HIROTAKA
JP5 patents
Patents
5 patentsUS6099574AAug 8, 2000
Method and apparatus for obtaining structure of semiconductor devices and memory for storing program for obtaining the same
TOSHIBA KK37 citations89
US6980942B2Dec 27, 2005
Method of simulation of production process of semiconductor device and simulator thereof
TOSHIBA KK3 citations61
US7162400B2Jan 9, 2007
Simulation method, simulation program, and semiconductor device manufacturing method each employing boundary conditions
TOSHIBA KK4 citations59
US7180114B2Feb 20, 2007
Semiconductor device
TOSHIBA KK1 citations50
US7081633B2Jul 25, 2006
Apparatus, method and program for ion implantation simulation, and computer readable storage medium having stored therein the program
TOSHIBA KK1 citations48