Inventor
HAYAMI YUKA
JP6 patents
Patents
6 patentsUS5927302AJul 27, 1999
Method for rinsing plate-shaped articles and cleaning bath and cleaning equipment used in the same
FUJITSU LTD21 citations91
US5474616ADec 12, 1995
Method for rinsing plate-shaped articles
FUJITSU LTD42 citations91
US5795494AAug 18, 1998
Semiconductor substrate cleaning method and semiconductor device fabrication method
FUJITSU LTD14 citations69
US7294577B2Nov 13, 2007
Method of manufacturing a silicide layer
FUJITSU LTD3 citations60
US7319066B2Jan 15, 2008
Semiconductor device and method for fabricating the same
FUJITSU LTD6 citations56
US7030026B2Apr 18, 2006
Semiconductor device fabrication method
FUJITSU LTD0 citations40