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Inventor
JAO CHIH-SHENG
TW
2 patents
Patents
2 patents
US8420305B2
Apr 16, 2013
Method and apparatus for generating periodic patterns by step-and-align interference lithography
WANG LON
0 citations
42
US8233136B2
Jul 31, 2012
Method and apparatus for generating periodic patterns by step-and-align interference lithography
WANG LON
0 citations
42