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Inventor
CHANG JER-HAUR
TW
3 patents
⚠️ This page may combine multiple inventors who share the name “CHANG JER-HAUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WANG LON
2 patents
US8420305B2
Apr 16, 2013
Method and apparatus for generating periodic patterns by step-and-align interference lithography
WANG LON
0 citations
42
US8233136B2
Jul 31, 2012
Method and apparatus for generating periodic patterns by step-and-align interference lithography
WANG LON
0 citations
42
CHANG JER-HAUR
1 patent
US8092737B2
Jan 10, 2012
Method of micro/nano imprinting
CHANG JER-HAUR
29 citations
84