Inventor
VELLORE KIM
US8 patents
⚠️ This page may combine multiple inventors who share the name “VELLORE KIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6598559B1Jul 29, 2003
Temperature controlled chamber
APPLIED MATERIALS INC573 citations96
US9696097B2Jul 4, 2017
Multi-substrate thermal management apparatus
APPLIED MATERIALS INC8 citations81
US10109514B2Oct 23, 2018
Visual feedback for process control in RTP chambers
APPLIED MATERIALS INC3 citations71
US9735034B2Aug 15, 2017
Visual feedback for process control in RTP chambers
APPLIED MATERIALS INC3 citations71
US11047039B2Jun 29, 2021
Substrate carrier having hard mask
APPLIED MATERIALS INC0 citations58
US9953851B2Apr 24, 2018
Process sheet resistance uniformity improvement using multiple melt laser exposures
APPLIED MATERIALS INC0 citations52
US9390926B2Jul 12, 2016
Process sheet resistance uniformity improvement using multiple melt laser exposures
APPLIED MATERIALS INC0 citations52