Inventor
JIANG WEINAN
CN9 patents
⚠️ This page may combine multiple inventors who share the name “JIANG WEINAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6699399B1Mar 2, 2004
Self-cleaning etch process
APPLIED MATERIALS INC500 citations98
US6136211AOct 24, 2000
Self-cleaning etch process
APPLIED MATERIALS INC160 citations98
US5978202ANov 2, 1999
Electrostatic chuck having a thermal transfer regulator pad
APPLIED MATERIALS INC81 citations95
US5893643AApr 13, 1999
Apparatus for measuring pedestal temperature in a semiconductor wafer processing system
APPLIED MATERIALS INC37 citations89
US5851926ADec 22, 1998
Method for etching transistor gates using a hardmask
APPLIED MATERIALS INC25 citations89