Inventor
DELLA ROSA JASON
US9 patents
Patents
9 patentsUS9911579B2Mar 6, 2018
Showerhead having a detachable high resistivity gas distribution plate
APPLIED MATERIALS INC6 citations83
US9666466B2May 30, 2017
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC10 citations83
US9610591B2Apr 4, 2017
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC8 citations83
US11130142B2Sep 28, 2021
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC1 citations72
US10790120B2Sep 29, 2020
Showerhead having a detachable high resistivity gas distribution plate
APPLIED MATERIALS INC1 citations72
US10625277B2Apr 21, 2020
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC2 citations72
US10607816B2Mar 31, 2020
Showerhead having a detachable high resistivity gas distribution plate
APPLIED MATERIALS INC3 citations72
US9991148B2Jun 5, 2018
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC1 citations62
US11088005B2Aug 10, 2021
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC0 citations59