Inventor
MIRIN NIKOLAY A
US7 patents
Patents
7 patentsUS11009798B2May 18, 2021
Wafer alignment markers, systems, and related methods
MICRON TECHNOLOGY INC5 citations82
US10388601B2Aug 20, 2019
Semiconductor devices including conductive lines and methods of forming the semiconductor devices
MICRON TECHNOLOGY INC4 citations69
US12230546B2Feb 18, 2025
Wafer registration and overlay measurement systems and related methods
MICRON TECHNOLOGY INC0 citations61
US11520240B2Dec 6, 2022
Wafer alignment markers, systems, and related methods
MICRON TECHNOLOGY INC0 citations61
US11251096B2Feb 15, 2022
Wafer registration and overlay measurement systems and related methods
MICRON TECHNOLOGY INC0 citations61
US10811355B2Oct 20, 2020
Methods of forming semiconductor devices
MICRON TECHNOLOGY INC0 citations48
US9911693B2Mar 6, 2018
Semiconductor devices including conductive lines and methods of forming the semiconductor devices
MICRON TECHNOLOGY INC0 citations48