Inventor
WEBER EDWARD V
8 patents
Patents
8 patentsUS4243866AJan 6, 1981
Method and apparatus for forming a variable size electron beam
IBM63 citations95
US5301124AApr 5, 1994
Registration of patterns formed of multiple fields
IBM46 citations88
US4149085AApr 10, 1979
Automatic overlay measurements using an electronic beam system as a measurement tool
IBM20 citations78
US4365163ADec 21, 1982
Pattern inspection tool - method and apparatus
IBM17 citations73
US4546260AOct 8, 1985
Alignment technique
IBM8 citations71
US5285074AFeb 8, 1994
Dynamic compensation of non-linear electron beam landing angle in variable axis lenses
IBM14 citations70
US4000440ADec 28, 1976
Method and apparatus for controlling brightness and alignment of a beam of charged particles
IBM12 citations70
US4581537AApr 8, 1986
Method for generating inspection patterns
IBM4 citations54