Inventor

TAN RAUL V

US4 patents

⚠️ This page may combine multiple inventors who share the name “TAN RAUL V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIPLEY CO

1 patent

US4890239ADec 26, 1989

Lithographic process analysis and control system

SHIPLEY CO82 citations91

KLA TENCOR CORP

1 patent

US9709386B1Jul 18, 2017

Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometry

KLA TENCOR CORP10 citations81

GEN SIGNAL CORP

1 patent

US4857738AAug 15, 1989

Absorption measurements of materials

GEN SIGNAL CORP22 citations80

HOECHST CELANESE

1 patent

US4874240AOct 17, 1989

Characterization of semiconductor resist material during processing

HOECHST CELANESE6 citations60