Inventor
HIGASHI GREGG SUMIO
US3 patents
Patents
3 patentsUS6169010B1Jan 2, 2001
Method for making integrated circuit capacitor including anchored plug
LUCENT TECHNOLOGIES INC23 citations87
US6153901ANov 28, 2000
Integrated circuit capacitor including anchored plug
LUCENT TECHNOLOGIES INC22 citations87
US6013556AJan 11, 2000
Method of integrated circuit fabrication
LUCENT TECHNOLOGIES INC3 citations55