Inventor
DAO GIANG
US8 patents
Patents
8 patentsUS6548417B2Apr 15, 2003
In-situ balancing for phase-shifting mask
INTEL CORP44 citations95
US6734443B2May 11, 2004
Apparatus and method for removing photomask contamination and controlling electrostatic discharge
INTEL CORP23 citations92
US6660649B2Dec 9, 2003
In-situ balancing for phase-shifting mask
INTEL CORP37 citations92
US6610123B2Aug 26, 2003
Filtered mask enclosure
INTEL CORP32 citations91
US6625800B1Sep 23, 2003
Method and apparatus for physical image based inspection system
INTEL CORP15 citations83
US6793717B2Sep 21, 2004
Apparatus for keeping contamination away from a mask during exposure with light
INTEL CORP4 citations61
US6537706B1Mar 25, 2003
Method for making a photolithographic mask
INTEL CORP1 citations52
US6611327B2Aug 26, 2003
Detection of contaminants on low wavelength masks
INTEL CORP0 citations44