Inventor
VANDERBERG BO
US8 patents
⚠️ This page may combine multiple inventors who share the name “VANDERBERG BO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
5 patentsUS10553392B1Feb 4, 2020
Scan and corrector magnet designs for high throughput scanned beam ion implanter
AXCELIS TECH INC2 citations69
US9318302B1Apr 19, 2016
Integrated extraction electrode manipulator for ion source
AXCELIS TECH INC3 citations69
US11114270B2Sep 7, 2021
Scanning magnet design with enhanced efficiency
AXCELIS TECH INC1 citations59
US11037754B2Jun 15, 2021
Scan and corrector magnet designs for high throughput scanned beam ion implanter
AXCELIS TECH INC0 citations59
US10573485B1Feb 25, 2020
Tetrode extraction apparatus for ion source
AXCELIS TECH INC1 citations59