Inventor
PALLIKKARA KUTTIATOOR SUDEEP
US6 patents
⚠️ This page may combine multiple inventors who share the name “PALLIKKARA KUTTIATOOR SUDEEP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
3 patentsUS9434859B2Sep 6, 2016
Chemical-mechanical planarization of polymer films
CABOT MICROELECTRONICS CORP3 citations71
US9422455B2Aug 23, 2016
CMP compositions exhibiting reduced dishing in STI wafer polishing
CABOT MICROELECTRONICS CORP3 citations68
US10640679B2May 5, 2020
CMP compositions selective for oxide and nitride with improved dishing and pattern selectivity
CABOT MICROELECTRONICS CORP0 citations49