Inventor
SEKI KYOHEI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SEKI KYOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
USHIO ELECTRIC INC
10 patentsUS7072375B2Jul 4, 2006
Line-narrowed gas laser system
USHIO ELECTRIC INC21 citations92
US6509970B1Jan 21, 2003
Wavelength monitoring apparatus for laser light for semiconductor exposure
USHIO ELECTRIC INC22 citations90
US5677113AOct 14, 1997
Method for ashing a photoresist resin film on a semiconductor wafer and an asher
USHIO ELECTRIC INC20 citations89
US7622727B2Nov 24, 2009
Extreme UV radiation source device
USHIO ELECTRIC INC16 citations83
US7459708B2Dec 2, 2008
Extreme UV radiation source device and method for eliminating debris which forms within the device
USHIO ELECTRIC INC10 citations83
US7700899B2Apr 20, 2010
Heating device of the light irradiation type
USHIO ELECTRIC INC3 citations62
US7756403B2Jul 13, 2010
Heating process of the light irradiation type
USHIO ELECTRIC INC5 citations61
US7535013B2May 19, 2009
Extreme UV radiation exposure tool and extreme UV radiation source device
USHIO ELECTRIC INC2 citations61
US7656079B2Feb 2, 2010
Heater and heating device with heaters with lamps having an independently powered multiple part filament
USHIO ELECTRIC INC3 citations60
US7912359B2Mar 22, 2011
Heating device of the light irradiation type
USHIO ELECTRIC INC1 citations51