Inventor
INOUE MITSURU
JP45 patents
⚠️ This page may combine multiple inventors who share the name “INOUE MITSURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
19 patentsUS6495847B1Dec 17, 2002
Stage control apparatus and exposure apparatus
CANON KK94 citations98
US6172738B1Jan 9, 2001
Scanning exposure apparatus and device manufacturing method using the same
CANON KK94 citations98
US5685232ANov 11, 1997
Positioning stage device exposure apparatus and device manufacturing method utilizing the same
CANON KK135 citations98
US5040431AAug 20, 1991
Movement guiding mechanism
CANON KK175 citations98
US5909272AJun 1, 1999
Stage and exposure apparatus using same
CANON KK53 citations96
US6133982AOct 17, 2000
Exposure apparatus
CANON KK26 citations93
US6730916B1May 4, 2004
Electron beam lithography apparatus
CANON KK28 citations92
US6320645B1Nov 20, 2001
Stage system and exposure apparatus, and device manufacturing method using the same
CANON KK30 citations92
US5933215AAug 3, 1999
Exposure apparatus and device manufacturing method using the same
CANON KK50 citations92
US7221463B2May 22, 2007
Positioning apparatus, exposure apparatus, and method for producing device
CANON KK13 citations84
US7030964B2Apr 18, 2006
Stage system, exposure apparatus, and device manufacturing method
CANON KK17 citations84
US6644855B2Nov 11, 2003
Stage device, exposure apparatus, device manufacturing method and movement guidance method
CANON KK13 citations83
US7123350B2Oct 17, 2006
Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate
CANON KK7 citations74
US5579084ANov 26, 1996
Apparatus and method for manufacturing semiconductors
CANON KK16 citations74
US5301933AApr 12, 1994
Sample moving device
CANON KK10 citations74
US7911588B2Mar 22, 2011
Exposure apparatus and original
CANON KK6 citations63
US7876419B2Jan 25, 2011
Exposure apparatus and device manufacturing method
CANON KK2 citations63
US6630986B2Oct 7, 2003
Scanning type exposure apparatus and a device manufacturing method using the same
CANON KK4 citations63
US6122059ASep 19, 2000
Scanning exposure apparatus and device fabrication method in which multiple laser interferometers use a respective laser head
CANON KK5 citations62
HITACHI LTD
15 patentsUS5781767AJul 14, 1998
Package blocking method for a storage system having a bus common to a plurality of kinds of groups of packages
HITACHI LTD141 citations99
US5588144ADec 24, 1996
Storage system having a bus common to a plurality of kinds of groups of packages
HITACHI LTD93 citations96
US6850998B2Feb 1, 2005
Disk array system and a method for controlling the disk array system
HITACHI LTD21 citations93
US7570447B2Aug 4, 2009
Storage control device and method for detecting write errors to storage media
HITACHI LTD32 citations92
US7042735B2May 9, 2006
Fitting substrate for connection and fitting substrate for connection for use in disk array control apparatus
HITACHI LTD14 citations84
US7360019B2Apr 15, 2008
Disk array device and data processing method thereof
HITACHI LTD5 citations74
US7269690B2Sep 11, 2007
Disk array device and data processing method thereof
HITACHI LTD8 citations74
US7103717B2Sep 5, 2006
Disk array device and data processing method thereof
HITACHI LTD9 citations74
US6199175B1Mar 6, 2001
Package blocking method for a storage system having a bus common to a plurality of kinds of groups of packages
HITACHI LTD5 citations74
US7522426B2Apr 21, 2009
Storage controller
HITACHI LTD6 citations73
US7752358B2Jul 6, 2010
Storage apparatus and conversion board for increasing the number of hard disk drive heads in a given, limited space
HITACHI LTD4 citations62
US6744054B2Jun 1, 2004
Evacuation use sample chamber and circuit pattern forming apparatus using the same
HITACHI LTD6 citations62
US7839653B2Nov 23, 2010
Storage controller
HITACHI LTD1 citations52
US8370578B2Feb 5, 2013
Storage controller and method of controlling storage controller
HITACHI LTD0 citations42
US7454216B2Nov 18, 2008
in-facility information provision system and in-facility information provision method
HITACHI LTD0 citations39