Inventor
GOLUBOVSKY EDWARD
US10 patents
Patents
10 patentsUSD947802SApr 5, 2022
Replaceable substrate carrier interfacing film
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Wafer processing tools and methods thereof
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Non-contact clean module
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High throughput polishing modules and modular polishing systems
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US12394651B2Aug 19, 2025
High throughput polishing modules and modular polishing systems
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US12142513B2Nov 12, 2024
Wafer processing tools and methods thereof
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Ground shield for a PVD chamber
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US12521841B2Jan 13, 2026
Pad carrier assembly for horizontal pre-clean module
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US11721563B2Aug 8, 2023
Non-contact clean module
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US11942319B2Mar 26, 2024
Pad carrier for horizontal pre-clean module
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