Inventor
RANGARAJAN JAGAN
US20 patents
⚠️ This page may combine multiple inventors who share the name “RANGARAJAN JAGAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS9227293B2Jan 5, 2016
Multi-platen multi-head polishing architecture
APPLIED MATERIALS INC6 citations73
US11749552B2Sep 5, 2023
Wafer processing tools and methods thereof
APPLIED MATERIALS INC2 citations70
US11705354B2Jul 18, 2023
Substrate handling systems
APPLIED MATERIALS INC2 citations69
US11289347B2Mar 29, 2022
Non-contact clean module
APPLIED MATERIALS INC2 citations68
US12400892B2Aug 26, 2025
High throughput polishing modules and modular polishing systems
APPLIED MATERIALS INC0 citations61
US12394651B2Aug 19, 2025
High throughput polishing modules and modular polishing systems
APPLIED MATERIALS INC0 citations61
US12142513B2Nov 12, 2024
Wafer processing tools and methods thereof
APPLIED MATERIALS INC0 citations60
US12521841B2Jan 13, 2026
Pad carrier assembly for horizontal pre-clean module
APPLIED MATERIALS INC0 citations58
US11721563B2Aug 8, 2023
Non-contact clean module
APPLIED MATERIALS INC0 citations57
US11693435B2Jul 4, 2023
Ethercat liquid flow controller communication for substrate processing systems
APPLIED MATERIALS INC1 citations53
US11745227B2Sep 5, 2023
Substrate cleaning devices and methods thereof
APPLIED MATERIALS INC0 citations52
US12198944B2Jan 14, 2025
Substrate handling in a modular polishing system with single substrate cleaning chambers
APPLIED MATERIALS INC0 citations51
US12500094B2Dec 16, 2025
Modular fluid delivery assembly
APPLIED MATERIALS INC0 citations50
US11942319B2Mar 26, 2024
Pad carrier for horizontal pre-clean module
APPLIED MATERIALS INC0 citations49
US11735438B2Aug 22, 2023
Methods and apparatus for Marangoni drying
APPLIED MATERIALS INC0 citations49
US10751738B2Aug 25, 2020
Spray bar design for uniform liquid flow distribution on a substrate
APPLIED MATERIALS INC0 citations45
US12525468B2Jan 13, 2026
Integrated clean and dry module for cleaning a substrate
APPLIED MATERIALS INC0 citations42