Inventor
RIGSBY MATTHEW A
US4 patents
Patents
4 patentsUS10329683B2Jun 25, 2019
Process for optimizing cobalt electrofill using sacrificial oxidants
LAM RES CORP2 citations68
US9777386B2Oct 3, 2017
Chemistry additives and process for cobalt film electrodeposition
LAM RES CORP5 citations68
US11078591B2Aug 3, 2021
Process for optimizing cobalt electrofill using sacrificial oxidants
LAM RES CORP0 citations57
US12535454B2Jan 27, 2026
Leveling compound control
LAM RES CORP0 citations49