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Inventor

ALONZO GERALD J

US7 patents
⚠️ This page may combine multiple inventors who share the name “ALONZO GERALD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULTRATECH STEPPER INC

3 patents
US5402205AMar 28, 1995

Alignment system for a Half-Field Dyson projection system

ULTRATECH STEPPER INC17 citations72
US5329332AJul 12, 1994

System for achieving a parallel relationship between surfaces of wafer and reticle of half-field dyson stepper

ULTRATECH STEPPER INC8 citations72
US5266790ANov 30, 1993

Focusing technique suitable for use with an unpatterned specular substrate

ULTRATECH STEPPER INC19 citations72

APPLIED MATERIALS INC

3 patents
US11764069B2Sep 19, 2023

Asymmetry correction via variable relative velocity of a wafer

APPLIED MATERIALS INC0 citations61
US11717936B2Aug 8, 2023

Methods for a web-based CMP system

APPLIED MATERIALS INC0 citations59
US7407433B2Aug 5, 2008

Pad characterization tool

APPLIED MATERIALS INC0 citations50

CHEN HUI

1 patent
US9646859B2May 9, 2017

Disk-brush cleaner module with fluid jet

CHEN HUI0 citations50