Inventor

HASPESLAGH LUC ROGER SIMONNE

BE3 patents

Patents

3 patents

US12276784B2Apr 15, 2025

Micromirror arrays

ASML NETHERLANDS BV0 citations57

US12259546B2Mar 25, 2025

Micromirror arrays

ASML NETHERLANDS BV0 citations57

US12339588B2Jun 24, 2025

High force low voltage piezoelectric micromirror actuator

ASML NETHERLANDS BV0 citations44