Inventor
CHEN YAN-CHENG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “CHEN YAN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS11816411B2Nov 14, 2023
Method and system for semiconductor wafer defect review
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US11764094B2Sep 19, 2023
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12087611B2Sep 10, 2024
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12190036B2Jan 7, 2025
Method and system for semiconductor wafer defect review
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12119273B2Oct 15, 2024
System and method for high speed inspection of semiconductor substrates
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US11749571B2Sep 5, 2023
System and method for high speed inspection of semiconductor substrates
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US12326397B2Jun 10, 2025
In-situ apparatus for detecting abnormality in process tube
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12272576B2Apr 8, 2025
Apparatus and methods for determining fluid dynamics of liquid film on wafer surface
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47