Inventor
YULIN SERGIY
DE3 patents
Patents
3 patentsUS7920323B2Apr 5, 2011
Thermally stable multilayer mirror for the EUV spectral region
FRAUNHOFER GES FORSCHUNG14 citations79
US11500137B2Nov 15, 2022
Multilayer mirror for reflecting EUV radiation and method for producing the same
FRAUNHOFER GES FORSCHUNG0 citations53
US7986455B2Jul 26, 2011
Thermally stable multilayer mirror for the EUV spectral range
FRAUNHOFER GES FORSCHUNG3 citations53