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Inventor
RAISANEN PETRI I
US
3 patents
⚠️ This page may combine multiple inventors who share the name “RAISANEN PETRI I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHERO ERIC
1 patent
US8883270B2
Nov 11, 2014
Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species
SHERO ERIC
544 citations
97
SHERO ERIC J
1 patent
US8877655B2
Nov 4, 2014
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
SHERO ERIC J
551 citations
96
RAISANEN PETRI I
1 patent
US8071452B2
Dec 6, 2011
Atomic layer deposition of hafnium lanthanum oxides
RAISANEN PETRI I
549 citations
94