Inventor

UJAZDOWSKI RICHARD CARL

US3 patents

⚠️ This page may combine multiple inventors who share the name “UJAZDOWSKI RICHARD CARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

1 patent

US6061376AMay 9, 2000

Tangential fan for excimer laser

CYMER INC14 citations65

Cymer LLC

1 patent

US11349273B2May 31, 2022

Apparatus for tuning discharge performance in a laser chamber

Cymer LLC1 citations57

LUO SIQI

1 patent

US10074953B2Sep 11, 2018

Erosion resistant electrodes for use in generating gas discharge laser

LUO SIQI0 citations25