Inventor
BURNS STEVEN WAYNE
US4 patents
Patents
4 patentsUS11209730B2Dec 28, 2021
Methods of generating drop patterns, systems for shaping films with the drop pattern, and methods of manufacturing an article with the drop pattern
CANON KK2 citations69
US10493672B2Dec 3, 2019
Imprint apparatus, method of manufacturing article, information processing apparatus, method of supporting map editing, and storage medium
CANON KK1 citations57
US11927883B2Mar 12, 2024
Method and apparatus to reduce variation of physical attribute of droplets using performance characteristic of dispensers
CANON KK0 citations45
US11526076B2Dec 13, 2022
Nanofabrication system with dispensing system for rotational dispensing
CANON KK0 citations45