Inventor
LIEBERT REUEL B
US6 patents
⚠️ This page may combine multiple inventors who share the name “LIEBERT REUEL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
3 patentsUS6020592AFeb 1, 2000
Dose monitor for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT155 citations96
US7935942B2May 3, 2011
Technique for low-temperature ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT16 citations91
US6762423B2Jul 13, 2004
Methods and apparatus for ion beam neutralization in magnets
VARIAN SEMICONDUCTOR EQUIPMENT18 citations82