Inventor
MIYAI TSUNEO
JP4 patents
Patents
4 patentsUS5581324ADec 3, 1996
Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors
NIKON CORP206 citations98
US5825470AOct 20, 1998
Exposure apparatus
NIKON CORP63 citations94
US5936711AAug 10, 1999
Projection exposure method and projection exposure apparatus
NIKON CORP15 citations72
US6900880B2May 31, 2005
Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method
NIKON CORP9 citations71